JPH0253942U - - Google Patents
Info
- Publication number
- JPH0253942U JPH0253942U JP13311488U JP13311488U JPH0253942U JP H0253942 U JPH0253942 U JP H0253942U JP 13311488 U JP13311488 U JP 13311488U JP 13311488 U JP13311488 U JP 13311488U JP H0253942 U JPH0253942 U JP H0253942U
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- gas supply
- supply mechanism
- mechanism section
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000010000 carbonizing Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 230000006698 induction Effects 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Carbon And Carbon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13311488U JPH0253942U (en]) | 1988-10-12 | 1988-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13311488U JPH0253942U (en]) | 1988-10-12 | 1988-10-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0253942U true JPH0253942U (en]) | 1990-04-18 |
Family
ID=31390691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13311488U Pending JPH0253942U (en]) | 1988-10-12 | 1988-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0253942U (en]) |
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1988
- 1988-10-12 JP JP13311488U patent/JPH0253942U/ja active Pending